激光能量波动对扫描法尺寸测量精度的影响

Effect of Laser Energy Changing on Accuracy of Size Measurement by Laser Scanning

在激光扫描法尺寸测量系统中 ,激光能量必须保持稳定。但是 ,在实际使用中 ,激光器输出能量会产生波动 ,导致系统检测精度下降甚至不准确。本文详细分析了能量波动对激光扫描法尺寸测量精度的影响 ,并给出了激光器输出能量自动测量电路及测量方法 ,以及能量波动的电补偿方法。该方法在激光外径在线检测仪中得到了很好的应用 ,实践证明有效。

In the system of size measurement by laser scanning, i t is necessary to keep laser energy stability. But in fact, output of laser energy is continuously changing as time passed, so that precision accuracy of detectin g system become poor. This paper analyzes the relationship between accuracy of size measurement and laser energy changing, puts forward laser energy auto-measu red and self-correct circuit. By experiment the method of electrical compensatio n for laser energy change gets satisfying result. It is applied to instrument of diameter mea surement by laser scaning successfully, which is effective and fea sible.