侧孔式微型传声器设计及模拟

Design and Simulation of the Microphone with Side-holes

提出了一种新的微型传声器电容结构,即侧孔式微传声器。侧面开孔一方面降低了振膜的初始应力,提高振膜的机械灵敏度。另一方面,侧面开孔可以减小气流阻力,提高微传声器的频率宽度,同时避免了背孔结构可能带来的"软背极板"效应。使用有限元分析软件ANSYS和MATLAB软件对侧孔式微传声器的机械灵敏度和频率响应进行了理论模拟。

The microphone with side-holes was designed and simulated.On one hand,the hole made on side decreased the initial stress,and increased the mechanical sensitivity of the diaphragm.On the other hand,the side-hole reduced the lacuna damp,and enlarged the frequency range according to flat frequency response,without the hole in back-plate.Different from the microphone with back hole,the 'soft back-plate' would be completely avoided in side-hole design.