射频等离子体自偏压及其对聚合成膜的影响

Study on Radio Frequency Plasma Self\|voltage and the Influence on Polymer

通过实验分析了射频等离子体自偏压的产生及与电子密度、电子温度的关系和对聚合成膜质量的影响并探讨了其机制,指出产生自偏压可明显改善等离子体聚合成膜质量,这是由于自偏压提高了等离子体中电子温度和电子密度的结果。在直接利用等离子体进行聚合反应制备薄膜时,应根据装置条件选择合适的自偏压值。

The occurrence of radio frequency plasma self\|voltage, the relation among electron temperature,electron density and self\|voltage and the influence on plasma polymer qualities are analyzed through the experiment. At the same time the mechanism of radio frequency plasma self\|voltage is discussed. Experiment results show qualities of plasma polymer are obviously improved, as electron temperature and electron density are increased by self\|voltage. Appropriate self\|voltage should be chosen according to the device when films are prepared by plasma polymerization.