摘要
Nanoindentation tests performed in a commercial atomic force microscope have been utilized to directly measure the elastic modulus and the hardness of single crystal copper thin films fabricated by the vacuum vapor deposition technique. Nanoindentation tests were conducted at various indentation depths to study the effect of indentation depths on the mechanical properties of thin films. The results were interpreted by using the Oliver-Pharr method with which direct observation and measurement of the contact area are not required. The elastic modulus of the single crystal copper film at various indentation depths was determined as (67.0±(6.9) GPa) on average which is in reasonable agreement with the results reported in literature. The indentation hardness constantly increases with decreasing indentation depth, indicating a strong size effect.
Nanoindentation tests performed in a commercial atomic force microscope have been utilized to directly measure the elastic modulus and the hardness of single crystal copper thin films fabricated by the vacuum vapor deposition technique. Nanoindentation tests were conducted at various indentation depths to study the effect of indentation depths on the mechanical properties of thin films. The results were interpreted by using the Oliver-Pharr method with which direct observation and measurement of the contact area are not required. The elastic modulus of the single crystal copper film at various indentation depths was determined as (67.0±(6.9) GPa) on average which is in reasonable agreement with the results reported in literature. The indentation hardness constantly increases with decreasing indentation depth, indicating a strong size effect.
基金
SponsoredbytheNationalNaturalScienceFoundationofChina(GrantNo .5 0 175017)andInterdisciplineFoundationofHarbinInstituteofTechnology (GrantNo .HIT .MD .2 0 0 0 .9) .
