薄膜特性的掠发射X射线荧光分析

Grazing Emission X-ray Fluorescence Analysis for Characteristics of Film

掠射X射线荧光分析技术是实验室分析薄膜特性的一种重要工具。文章简述了利用掠出射X射线荧光技术分析薄膜厚度的原理和方法,介绍了一种可在实验室里实现薄膜特性测试的掠发射X射线荧光分析装置,该装置采用波长色散方式结合超薄窗流气正比计数管,可实现对轻元素的探测。最后从理论上计算了Si片上不同厚度的几种单层薄膜的X射线荧光强度和掠出射角的依赖关系。证明了掠发射X射线荧光分析是一种精确的分析薄膜厚度等特性的方法。

Grazing emission X-ray fluorescence analysis is one of the important tools for the characterization of film in lab. In this paper, the principle and method are presented briefly for grazing emission X-ray fluorescence to analyze the thickness of the film. A set of equipment for film testing was set up in our laboratory, and its construction is described. The prototype setup is composed of a X-ray tube, a spectromenter and a gas-flow proportional counter with thin-film windows. The X-ray fluorescence produced by low Z element can be detected with this prototype setup. Meanwhile, the exit-angle dependence of the fluorescent X-ray intensity of some thin films with different thickness on Si substrates was demonstrated in theory, and the calculation results prove that the grazing emission X-ray fluorescence analysis is a good way to study the characteristics of film, such as the thickness of film.