混合集成微型光纤光谱仪的实验测定

The Experimental Test of a Reflecting Hybrid Micro Fiber Spectrometer

文中简述了所研制微型光谱仪的基本原理和基本结构,并对该微型光谱仪进行了实验测试和标定。在实验中采用汞灯作为测试所用的光源,分别使用不同芯径和数值孔径的光纤作为光输入元件,实验结果表明该光谱仪具有很好的线性度,在采用50μm的多模光纤时,光谱分辨率可达13.8nm,在采用9μm的单模光纤时分辨率可以达到5.5nm。

In recent years, with the development of the micro-opto-electro-mechanical system (MOEMS) technique, the fabrication of micro spectrometer with high performance and low cost becomes possible. At the same time, the existing micro spectrometers have difficulties in the regulation and installation, because the precise arrangement of optical units is required to obtain fine performance. With the introduction of integration, which can easily control the precision in regulation and installation, such problems can be easily settled. In the present work, a micro-spectrometer was fabricated, and its structure and working principle were introduced. Experiments were carried out to test the performance, of this device. In the experiments, the light source was Fig lamp. Optical fibers with different radius and numerical aperture were used as the input units. The results show a fine linearity. The spectrum resolution was about 13.8 nm, when a multi-mode fiber was used. A resolution of 5.5 nm achieved, when a single mode fiber was used.