非对称式压电陶瓷微位移器驱动电源设计

Design of Unsymmetric PZT Driver

提出一种新的压电陶瓷微位移器(PZT)驱动电源设计方案,该电源采用非对称供电方式,具有线性度好、纹波小、带负载能力强、频率响应高、重复性好等特点,这种电源克服了传统的PZT驱动电源的频率响应低、输出低电压时出现饱和失真等缺陷,满足了自适应移相干涉测量的要求。

A new design for PZT driver is presented. The driver with unsymmetric power supply possesses some advantages of good linearity, low ripple noise, powerful payload capability, high frequency responsibility and stable repeatability. The shortage of the traditional PZT driver is overcomed and the requirement for anti-vibration interferometer is satisfied.