纳米晶体TiO_2多孔膜的制备

Preparation of Nanocrystalline Porous TiO_2 Thin Films

采用电子束蒸发方法成功制备了用于光电变色器件的纳晶多孔结构 Ti O2 薄膜 ,借助于俄歇仪 (AES)和原子力显微镜 (AFM)分析了制备条件对薄膜的表面形貌、粒径大小及化学计量比的影响。最终给出了制备光电变色器件用纳晶多孔结构 Ti O2

The nanocrystalline porous TiO 2 thin films used in photoelectrochromic device s were prepared by the electron beam evaporation. The surface morphology, partic le size and stoichiometry affected by preparing conditions were analyzed with AE S and AFM. The technique parameters were given for the preparation of nanocrysta lline porous TiO 2 thin films used in photoelectrochromic devices.