直流PCVD法沉积TiN超硬膜工艺中的几个问题

Some Problems in TiN Coating Processes with DC-PCVD

本文讨论了直流PCVD法沉积TiN工艺中温度控制、色泽控制等问题,提出了预防工件过热、确保涂层色泽的工艺措施,还提出了涂层黑斑的成因及消除方法。

Abstract DC - PCVD for TiN coating processes was discussed with temperature control. Coating colour control and other problems. Some measures of preventing substrate from overheating and of ensuring coating colour were put forward . The reason for black spot on coating was also pointed out and eliminating methods were raised.