用二元光学器件实现对CO_2激光束的圆形光斑到均匀光强分布的矩形光斑的变换

Transformation from the Circular Facula to the Homogeneous Intensity Rectangle Facula for co_2 Laser Beam by Binary Optical Element

设计并制作了一种具有8个位相级的二元光学器件,将波长为10．6μmCO_2激光器输出的圆形光斑变换成均匀光强分布的矩形光斑。器件制作在GaAs基片上,两面镀有光学增透膜,适用于2000W的大功率激光加工系统中。此器件可以根据需要设计成不同规格。

Abstract This paper introduces a kind of binary optical element which comprise eight phrase stage,this element has been designed, manufactured and used to transform the facula which is formed by CO2 laser whose ware length is 10. 6/im from the circular facula to the homogeneous intensity rectangle facula. The element is made by plating reflection reducing coating on the base of GaAs and can be used to 2000W high power laser processing system. The element can be manufactured to different specifications recording to the user's demands.