MOS工艺工程技术研究

A Study on the Engineering Techniques for MOS Technology

本文阐述了MOS/CMOS工艺工程技术的特点、研究内容和研究方法,对工艺工程技术进行了全面而系统的分析研究,以提高工艺综合水平,加速MOS和CMOS集成电路向高速化高集成化方向发展,并适应多电路品种的科研开发线和生产线的需要。工艺工程技术研究的核心,就是要解决把单项工艺技术与器件技术综合起来,并转化成集成电路产品的过程中所碰到的关键技术问题。它具有一定的系统性,既要遵循科技发展规律,又要遵循经济发展规律。

The implications and characteristics of the engineering techniques for MOS/CMOS technologies are elaborated and the studying method is discussed in the paper. With the aim of improving the overall technology and promoting the development of high speeding and high integration for production of MOS/CMOS IC's.the technology engineering has been completely analyzed and systematically examined. The technology engineering is centered on the integration of individual process technologies with device techniques for IC products. It is the job of this study to look for solutions to problems associated with critical techniques encountered in the process of integration.