摘要
通过对几种IC失效样品失效分析结果的展示,叙述了这些结果的内在原因及其对可靠性的影响;针对出现的失效提出了相应的控制和纠正措施。
A few types of failed IC samples have been analyzed. The internal causes and their effects on the reliability of IC'S are described in the paper. For the noticed failures, pertinent measures to control and correct them have been proposed.
出处
《微电子学》
CAS
CSCD
1992年第6期59-63,共5页
Microelectronics
关键词
可靠性
失效分析
缺陷
集成电路
Reliability, Failure analysis, Defect, Process error
