摘要
介绍一种基于静态干涉术的微表面显微干涉计算机自动检测系统,给出用数字图象处理技术对干涉条纹进行处理的原理步骤,并推导了用最小二乘法拟合提取显微干涉条纹特征信息的算法以及由此获取微表面几何参数和粗糙等参数的方法。
An interference microscopic auto-measuring system which is based on static interferometry is described. The principles and steps for processing the interference fringes with digital image processing techniques are given. An algorithm for interfereogram characteristic information extracting with the method of standard least-square fitting is proposed,and hereby the way to obtain the geometric parameters and roughness of a micro-surface is derived.
出处
《江西科学》
2003年第4期284-287,共4页
Jiangxi Science
基金
2001年江西省教育厅科技项目资助
