摘要
CVD diamond films were synthesized by the chemical vapor deposition method.The crystal boundary was investigated using transmission electron microscopy and scan electron microscopy.The second grains facilitate the more compact film formation.No micro-holes are seen among diamond grains in the films but there are micro-holes in the interface of film/substrate.The second grain and the primary grain would keep the twin relationship of<110/70.5°.A lot of micro-twins are observed in fivefold twin grains but there is a zone of non twins which is like a strip along the fivefold twin boundary.Two microtwins keep the twin relationship of<110/70.5° with the fivefold twin matrix.The width and length of microtwins are about 3 nm and 32 nm,respectively.
CVD diamond films were synthesized by the chemical vapor deposition method.The crystal boundary was investigated using transmission electron microscopy and scan electron microscopy.The second grains facilitate the more compact film formation.No micro-holes are seen among diamond grains in the films but there are micro-holes in the interface of film/substrate.The second grain and the primary grain would keep the twin relationship of<110/70.5°.A lot of micro-twins are observed in fivefold twin grains but there is a zone of non twins which is like a strip along the fivefold twin boundary.Two microtwins keep the twin relationship of<110/70.5° with the fivefold twin matrix.The width and length of microtwins are about 3 nm and 32 nm,respectively.
基金
Item Sponsored by the Guangdong Provincial Natural Science Foundation Under Grant No.04300026
the Jiangmen Science and Technology Project
the Project of Jiangmen Polytechnic
