摘要
本文简要介绍了纳米器件中量子传输效应、电子速度过冲现象、以及典型的量子效应器件,并对干法刻蚀工艺在纳米器件加工中的重要意义和目前发展状况作了较详细的介绍。
The quantum tranemisson effect and electron velocity overshoot phenomenon in nanometre devices as well typical quantum effect devices are described briefly.In addition the important significance and developing situations of dry-etch technologies in nanometre devices fabrication are introduced in detail.
出处
《微细加工技术》
1992年第1期65-75,共11页
Microfabrication Technology
关键词
纳米器件
量子效应
干法刻蚀
Nanometre devices
Quantum effect
Dry-etch.
