摘要
本文简要介绍了离子注入和器件的关系,概述了离子注入机的发展现状和趋势,初步探讨了我国离子注入机不能形成产业的原因。
The relations between the ion implantation and devices are briefly introduced. The recent situation and development tendency of ion implanter outlined. The reasons why the industry for manufacturing ion implanter can not be formed in our country are preliminary analysed.
出处
《微细加工技术》
1992年第2期1-14,共14页
Microfabrication Technology
关键词
离子注入
离子注入机
ion implantation
ion implanter