摘要
本文介绍了类金刚石碳膜的结构和性能在高能离子束辐照、真空热退火及脉冲激光辐照等后处理条件下的变化特征,并就该膜在各种处理条件下的相变机制研究现状进行了评述。
The characteristics change of physical, mechanical and chemical properties of diamond-like carbon films after high energy ion beam irradiations, vacuum annealing and pulsed-laser beam bombardment are introduced. The present state in studying the transformation mechanisms of the films under different post-treatment conditions are reviewed.
出处
《微细加工技术》
1992年第2期62-69,共8页
Microfabrication Technology
关键词
后处理条件
类金刚石
碳膜
diamond-like carbon film
post-treatment condition
structure and property
phase transition mechanism
