摘要
利用MEVVA源(金属蒸汽真空弧离子源)引出的强束流脉冲钼离子对H13钢进行了不同束流密度的离子注入。加速电压是48kV,剂量为2×10^(17)cm^(-2),束流密度在25至68μA.cm^(-2)间。x衍射分析证明在注入层内可形成MO_2C相。磨损试验证明:注钼H13钢的磨损特性随着束流的变化而变化。最后指出了MEVVA源在材料表面改性方面的应用前景。
Mo ions of various current densities produced by the first metal vapour vacuum arc (MEWA) ion source in China were imlpanted into Hl3 steel (0.35C6Cr1.5MoV). Ion acceleration voltage was 48kV. Implant doses were 2×1017cm-2and the flux was from 25 to 48 uA.cm-2. It was observed by X -ray diffration that compounds such as Mo2C could be formed.A pin-on -disc configuration was used for the wear testing.Wear groose depths and widths were measured with a optic interference microscope. The wear testing demonstrated that the wear resistance Mo implanted H13 steel would vary with fluxes. It is concluded that the MEVVA type of ion source shows promises for metal ion implantations into steel components for industrial application.
出处
《微细加工技术》
1992年第4期6-8,共3页
Microfabrication Technology
基金
国家863项目
