摘要
本文概述了表面缺陷光电传感器的特点、原理和分类方法。论述了这类传感器的灵敏度和信噪比的估计方法,计算了1微米分辨能力的D、K数值。本文提出了一种区分缺陷类别的光学方法。最后,介绍了这类传感器的设计要点和及评定性能的方法。
This paper describes the features, principle and sorting method of the photoelectric sensor for surface flaw detection. The computing method of the sensor sensitivity, signal-to-noise, are described. The (?)number of D and K for 1 micron resolving power are computed. An optical method for classifying defects and the gists of design and the method of evaluating function on the sensor are presented also.
出处
《仪器仪表学报》
EI
CAS
1980年第4期94-101,共8页
Chinese Journal of Scientific Instrument