表面缺陷光电传感器

Photoelectric Sensor for Surface Flaw Detection

本文概述了表面缺陷光电传感器的特点、原理和分类方法。论述了这类传感器的灵敏度和信噪比的估计方法,计算了1微米分辨能力的D、K数值。本文提出了一种区分缺陷类别的光学方法。最后,介绍了这类传感器的设计要点和及评定性能的方法。

This paper describes the features, principle and sorting method of the photoelectric sensor for surface flaw detection. The computing method of the sensor sensitivity, signal-to-noise, are described. The (?)number of D and K for 1 micron resolving power are computed. An optical method for classifying defects and the gists of design and the method of evaluating function on the sensor are presented also.