离子探针分析与中性粒子束

Ion Microprobe Analysis and Neutral Particle Beam

本文介绍了在国产LT-1离子探针上作的有关中性粒子束的实验工作。描述了中性粒子束密度的测量方法。利用中性粒子束分析导体、半导体和绝缘体,并和负离子分析绝缘体的情况进行对比。总的来看,中性粒子束分析绝缘体的灵敏度很低,在一次离子束中有中性粒子存在时,对质量分辨和微区分析都非常不利。这就说明一次离子束应该加装一个离子束的纯化装置,把包括中性粒子在内的所有杂质粒子都过滤掉,这对离子探针的分析将是很重要的。

This paper reports results of experiments on neutral particle beamusing the national product ion microprobe mass analyzer model LT-1. This pa-per describes the measuring method of density of neutral particle beam. The neu-tral particle beam used for specimen bombardment is generated by a duoplasmatronsource and accelerated to 16 KeV.Specimens for test include conductors, semicond-uctors and insulators. Results of the tests on insulator glass specimen under neutralparticle beam bombardment, show itself very low in sensitivity, as compared tothose under negative primary ion bombardment. Experiments also show that thepresent of neutral particles in the primary ion beam would be harmful to massresolution and analysis of micrometer area. These imply that the primary ion beamshould be filtered to avoid the neutrals.