一种新型的尺寸气动测量与控制仪器—硅力敏式气动量仪

A Kind of New Linear Measuring and Controlling Instrument "Pneumatic Instrument with Solid State Transducer"

研制了一种以差压式半导体硅力敏传感器为压力检测元件的精密尺寸测量与控制仪器——GLQ型硅力敏式气动量仪。该仪器结构小巧,稳定可靠,线性范围宽,增益可调范围大,动态特性好,并兼有气,电双重优点,提高了仪器对不同测量对象的适应能力。实测表明,当采用喷嘴挡板式非接触气动测头时,仪表精度优于2%FS,示值稳定性误差小于1%FS,动态响应的稳定时间为0.1～0.2秒,比现有薄膜和波纹管式气动量仪减小3～5倍。为精密尺寸的气动测量与控制提供了一种新型的量仪。

In this paper, a kind of linear precision measuring and controlling instrument, GLQ type pneumatic instrument with solid state transducer, is introduced,It is small in structure, stable, reliable and has wide linear range, large adjustable range in gain and good dynamic characteristic, as well as the advantages of electropneumatic. All these raise the adaptability of the instrument obviously. The experiments showed (?)hat measuring accuracy of the instrument is superior to 2% FS. The error of stability of the indication is<1%FS. Stable time of transient response is 0.1～0.2sec,which has reduced 3～5 times than present pneumatic instrument with membrane and bellows. A new type of pneumatic instrument has provided for linear precision measuring and controlling. This paper refers to the component of the instrument, considering problems in design, compensated method of temperature drift of transducer and gives testing data of static and dynamic characteristic of instrument.