照射型莫尔轮廓法的灵敏度极限

The Sensitivity Limit of Shadow Moire Topography

文中推导出确定照射型莫尔轮廓法极限测量深度的计算公式。对于一定的测量深度,文中导出了可获得最高灵敏度时的配置尺寸;选用光栅的最小栅距以及能达到最高灵敏度的计算公式,最后以实验加以证实。

The mathematical expression for the measuring depth limit of the shadow moire topography is proposed.In this paper,some formulas for opti mizing collocation size and the minimal pitch of grating in order to obtainmaximal sensitivity are derived We have taken photographs of the contourmoire fringes of the conic surfaces with set of unequal pitches of grating atdifferent distances of lamp.The experimental results are compared withtheoretical expectations and show that these formulas are valid.