摘要
利用筒镜分析器(CMA)固有的S形象差曲线求得最佳工作参数来设计CMA,可以显著地减小角度象差而大大提高俄歇电子能谱仪(AES)的性能。本文叙述用这一新方法设计的CMA的结构尺寸和测试结果,并与原按二级聚焦法设计的CMA的性能进行了比较。
A cylindrical mirror analyzer (CMA) with optimum operation parameters, derived from its inherent S-type aberration characteristics, was de-signed in order to improve the performances of an Auger electron spectrometer.Experiments showed that the new CMA can decrease the angular aberrationand thus improve the resolution or the transmission in comparison with acurrently used CMA, which was designed under second--order focussing conditions.
出处
《仪器仪表学报》
EI
CAS
1985年第1期22-27,共6页
Chinese Journal of Scientific Instrument
