摘要
本文介绍了激光散射仪的测量原理、仪器结构及测量误差分析。仪器实际测量结果:灵敏度为4×10_(-6),相对测量精度优于±10%。
The principle and the arrangement of the instrument for measur-ing scattering of multilayer dielectric mirrors are described in this paper. Themeasure errors are analysed and some measure results are given. The sensitivityof the instrument is 4 ×10^(-6) and the relative measure accuracy is better than±10%.
出处
《仪器仪表学报》
EI
CAS
1985年第3期261-264,共4页
Chinese Journal of Scientific Instrument
