摘要
本文介绍用正交试验法来提高试验的效率,以迅速找到较佳条件。并采用电子扫描显微镜进行线槽的微结构研究,取得了一定的效果。
This paper describes to rise the testing efficiency by orthogonaltesting method for finding very good etching condition.The researching micro-construction of the etching lines by electro-scanning microscope was madeconsiderable headway.
出处
《仪器仪表学报》
EI
CAS
1987年第2期154-159,共6页
Chinese Journal of Scientific Instrument
