高精度微流体多参数液压油检测芯片设计

High precision microfluidic multi-parameter hydraulic oil detection chip design

在液压系统中,金属磨粒是影响液压系统正常运转的一个重要指标。所介绍的芯片是一种环形流道,基于电感电容原理的微流体油液金属颗粒计数器,当液压油中的磨粒、气泡和水滴流经空间微螺线管时引起了磁通量变化或介电常数的变化。用电感检测方法,在2 MHz的激励频率下使用27匝线圈能检测到30μm铁颗粒和110μm铜颗粒;用电容检测方法在1.3 MHz的激励频率下能检测到100μm的水滴和180μm的气泡。铁的检测精度明显提高,其余在原有的检测精度基础上提高了信噪比,同时增大了流道直径,检测液压油的通量变大,提高了检测颗粒的效率。改进后的芯片具有良好的实际应用价值与广阔的发展前景。

In the hydraulic system,metal abrasive particles are the important indicator which effects the normal operation of the hydraulic system.In this study,one kind of chip with a circular flow channel is introduced.The microfluidic oil metal particle counter is based on the principle of inductance and capacitance,which causes magnetic flux change or dielectric when abrasive particles,bubbles and water droplets in the hydraulic oil flow through the space micro solenoid.Inductive detection method is utilized to detect 30μm iron particle and 110μm copper particle using a 27-inch coil at an excitation frequency of 2 MHz.The 100μm water droplets and 180μm bubbles are detected by a capacitance detection method at an excitation frequency of 1.3 MHz.Experimental results show that the detection accuracy of iron is obviously improved.The signal-to-noise ratio based on the original detection accuracy is improved.Meanwhile,the diameter of the flow channel is increased,the flux of the detected hydraulic oil is increased,and the efficiency of detecting the particles is enhanced.This improved chip has good practical application value and broad development prospects.