一种可移动超分辨成像系统的制备及其性质研究

Fabrication of removable superlens and research of its characteristics

基于浸没透镜设计了一种超分辨成像系统,利用SU-8光刻胶和直径为4.87μm的微球实现纳米级别的超分辨成像。介绍微球成像放大率的求解方法,并通过软件模拟了超分辨成像系统的焦距。通过改变SU-8胶的厚度(从3.4μm到0),系统的放大率也随之改变(放大率从1.6x到2.6x)。实验表明:SU-8胶的厚度对微球放大率有直接影响,通过该系统可以在普通光学显微镜下观察到蓝光光碟条纹。

Based on the solid immersion lenses(SILs),a new super-resolution system with nanometer scale was designed by using the SU-8photoresist and a 4.87μm diameter spherical lens.The computation process of the magnification was introduced.The focal distance was simulated by softwares in addition.By changing the thickness of the SU-8layer from 3.4μm to 0,the systems magnification was changed from 1.6xto 2.6x.Experiment results show that the thickness of SU-8photoresist influences the magnification directly,the stripe patterns of the blu-ray disc can be observed in ordinary optical microscopes by using the super-resolution system.