飞焦级脉冲激光能量测量方法研究

Measurement method for femto-Joule level pulse laser energy

为解决1fJ^1pJ脉冲激光能量的测量问题,提出了一种基于时域波形积分的飞焦级脉冲激光能量测量方法。该方法采用光电倍增管(PMT)获得飞焦级脉冲激光的响应信号,该微弱响应信号经放大、校准与激光脉冲时域波形积分后实现飞焦级脉冲激光能量测量。根据该方法设计了飞焦级脉冲激光能量测量装置,并分析了该装置的测量不确定度。实验表明,该装置实现了波长1 064nm、脉冲宽度5ns^1μs、能量范围1fJ^1pJ的脉冲激光光源的能量测量,测量不确定度为15.8%。

To solve the problem of 1 fJ^1 pJ laser energy measurement ,a femto-Joule level pulse laser energy measurement method based on integration of the time domain waveform was proposed ,w hich used a photomultiplier tube (PM T ) to get the response signal of femto-Joule level pulse laser .It realized femto-Joule level pulse laser energy measurement finally after am-plifying ,calibrating this weak response signal and the laser pulse time domain waveform inte-gration .According to this method ,a femto-Joule level pulse laser energy measurement device was designed and the measurement uncertainty of the device was analyzed .Experiments show that the device implements the energy measurement of pulsed laser source with 1 064 nm wave-length ,5 ns^1 μs pulse width and 1 fJ^1 pJ energy range ,the measurement uncertainty is 15 .8% .