248 nm准分子激光加工锥形微孔的实验研究

Experimental Investigation on Conical Microholes Fabrication with 248 nm Excimer Laser

针对准分子激光加工PMMA薄板上的微孔形貌进行研究,首先分析了激光脉冲数目对微孔深度的影响,进一步探究了激光脉冲数、激光单脉冲能量和激光脉冲频率等参数对微孔锥度的影响。利用光学显微镜和扫描电镜对打孔效果进行观察,结果表明,在一定范围内,微孔深度随激光脉冲数目线性增加,而微孔锥度随激光脉冲数目线性降低,微孔锥度随激光单脉冲能量线性降低,且影响效果显著;激光脉冲频率对微孔锥度无影响。通过合理选择激光脉冲个数,适当选择较低的单脉冲能量,可以得到较大深度和一定锥度且加工质量良好的锥形微孔。

In this paper,the morphology of micro-holes on PMMA thin plate manufactured by excimer laser is studied.The influence of laser pulse number on the micro-hole depth is firstly analyzed,and the influence of laser pulse number,laser single pulse energy and laser pulse frequency on the micro-hole taper is further explored.Drilling efficient was observed by optical microscope and SEM.It was showed that in a certain range,the pore depth increases linearly with the number of laser pulses,while the micro-hole taper decreases linearly with the number of laser pulses,and the micro-hole taper decreases linearly with the laser single pulse energy,All the effects are significant.Meanwhile,the laser pulse frequency has no effect on the micro-hole taper.By selecting proper number of laser pulses and low single pulse energy properly,a conical micro-hole with good quality can be obtained with a large depth and a certain taper.