一种准分子激光曲面微加工过程补偿装置

A Compensation Device for Excimer Laser Surface Micromachining

准分子激光直写在曲面加工情形下的加工效果将呈现出加工不均匀、加工线宽不一致等现象。为了实现准分子激光曲面微加工过程中对加工位置的监测补偿。在装置运行前选取基准距离,在装置运行过程中,对每一刻的加工位置进行跟踪。当加工点位于曲面下偏点或上偏离点时,电动平移台进行反向补偿将该点拉回至基准线上,以此保证每一刻的加工距离相等,即加工平台实时随同工件表面发生相同起伏变化,使得工件表面上作用光斑的大小保持不变。为了达成这一目的,进行了补偿装置硬件方案的搭建,以及传感器参数匹配和随动跟踪软件的开发。研制出了一套移动速度大于100μm/s、补偿误差小于20μm,能够适用于金属和非金属材料加工的准分子激光曲面微加工过程补偿装置。并且,通过实验对该装置的补偿性能和补偿加工效果进行了验证。在连续进行100次的补偿性能测试中,最大偏差大于20μm的次数共有18次,大于30μm的次数占其中2次。该装置由六轴电动平移台、运动控制卡、激光感测头、激光感测控制器以及PC电脑构成。其次,基于MFC框架由C++语言编写了准分子曲面加工的随动跟踪软件,该软件发送的控制信号能够灵活控制电动平移台做出响应。

The processing effect of excimer laser Direct Writing in the case of surface machining will show the phenomenon of uneven processing and inconsistent processing line width.etc.The main work of this study is to realize the monitoring and compensation of the machining position in the surface micromachining process of excimer laser.The reference distance is selected before the operation of the device,and the machining position of each moment is tracked during the operation of the device.When the machining point is located at the lower deviation point or upper deviation point of the surface bias,the electric pan is reverse compensated to pull the point back to the baseline.In this way,the equal processing distance of each moment is ensured,which means that the machining platform in real time with the same fluctuation changes on the surface of the workpiece,so that the size of the workpiece on the surface remains unchanged.In order to achieve this goal,the hardware scheme of compensation device is constructed,and the sensor parameter matching and follow-up tracking software are developed.A set of excimer laser surface micromachining compensation device which can be applied to the processing of metal and non-metallic materials is developed,of which the move speed is more than 100μm/s and the compensation error is less than 20μm.Furthermore,the compensation performance and compensation processing effect of the device are verified by experiments.The maximum deviation were greater than 20μm in 18 of 100 compensation performance tests,and 2 of those were over 30μm.The device is composed of six-axis electric translation table,motion control card,laser sensor head,Laser sensing controller and PC computer.Secondly,based on the MFC framework,the follow-up software of excimer laser surface machining is written by C++language,and the control signal sent by the software can flexibly control the response of electric translation table.