摘要
采用电解腐蚀工艺制得了形态良好的钽场发射阴极针尖,其高度小于0.1mm,曲率半径在0.1～0.5μm间.再利用在钽针尖上的固-气相反应法,制得钽芯氮化钽、炭化钽和炭化氮化钽三种场发射阴极,给出了它们的场发射图象和有关场发射特性的实验数据.实验结果表明含钽化合物是一类性能良好的场发射阴极材料.
Tantalum tips with radius 0.1-0.5μm had been prepared by electrochemical etching, and then field-emission cathodes of tantalum nitride (Ta2N) tantalum carbide (Ta C), and tantalum carbide-nitride (TaNx Cy) with Ta-core were prepared by solidgas reaction on the surface of Ta tips. Typical field-emission patterns and work functions Regarding fild-emission characteristics were given. It is shown that tantalum compounds are promising materials for field emitters.
出处
《应用科学学报》
CAS
1986年第2期126-131,共6页
Journal of Applied Sciences
