微细钻铣刀具表面涂层制备及应用研究进展(Ⅰ)

Fabrication and Application Research of Surface Coatings on Micro-Drills and Micro-Milling Tools(Ⅰ)

在微细钻铣刀具上进行涂层制备是有效提高微切削质量与加工效率的方法。金刚石涂层、类金刚石涂层和过渡族金属碳/氮化物涂层在微细钻铣刀具上得到了广泛应用,而应用于传统大直径刀具上的硼化物涂层、氧化物涂层等,在微细钻铣刀具上的应用仍处于开发阶段。刀具表面涂层制备技术主要有物理气相沉积技术、化学气相沉积技术和原子层沉积技术。本文从微细钻铣刀具出发,综述了各种制备方法的特点,介绍了近年来在刀具前处理、涂层晶粒直径、沉积参数控制及刀具夹具设计等关键技术点上的研究进展,对微细钻铣刀具表面涂层的制备具有指导意义。伴随着微细钻铣刀具涂层制备技术的优化更新,涂层材料和涂层结构的不断发展,使得刀具涂层的最高硬度和使用温度不断提高。

Hard coatings deposited on micro drills and milling tools can effectively improve micro-machining quality and processing efficiency. Diamond coatings, diamond-like carbon coatings and carbide/nitride coatings of transition metal have been wildly applied in micro-tools, and boride coatings as well as oxide coatings, which have been utilized in conventional macro tools, are still in the development stage for micro-tools. The tool coating fabrication method includes physical vapor deposition, chemical vapor deposition and atomic layer deposition. Based on the micro-drills and micro-milling tools, recently research progresses on pre-treatment, coating grain diameter, deposition parameter control as well as micro tool fixture design are reviewed, which have guiding significance for the micro-tools coating deposition. With the optimization and updating of coating fabrication method, the continuous evolvements of coating materials and structures have led to the continuous improvement in the maximum hardness and service temperature of tool coating.