a-C∶H/a-Se复合膜非平衡晶化分形特征的SEM观测

SEM study on Fractal Characteristics of Non-Equilibrium Crystallization of a-C:H/a-Se Complex Films

a-C∶H/a-Se/Al 感光体的 a-C:H 层在能流密度的6.4×10^(14)eV/mm^2·s 的离子流轰击下发生了非平衡晶化凝聚。晶体凝聚物为“链环状分形”。用盒子计数法测得其分数维 D_0=1.35±0.04;用相关函数法测得其关联维为 D_2=1.39±0.03。这与我们用计算机模拟的结果很好地符合。本文同时讨论了这一系列文章([2][3]及本文)对发展一种新的非平衡晶化分析方法的意义。

The a-C:H layer of a-C:H/a-Se/Al photoreceptor was crystallized by the bom-bardment of ion beam with the energy flux density of 6.4×10^(14) eV/mm^2·s.The“chain—cycle”like fractal was obtained in such a non-equilibrium crystallization-aggregation process.The fractal dimension was measured as D=1.35±0.04 by themethod of sandbox;while the correlation dimension was 1.39±0.03by the densitycorrelation function method.The significance of three articles written by us for de-veloping a new non-equilibrium crystallization analysis method was also discussed.