硅集成电路用SiGe/Si异质结构材料及其制备技术

SiGe Heterostructures Used for Silicon Integrated Circuit and Its Preparation Technology

SiGe技术是微电子领域的前沿技术 ,在硅基集成电路方面有重要应用。介绍了SiGe/Si和SiGe OI两种SiGeSi异质结构材料 ,综述了这两种材料的制备技术和研究进展 ,讨论了SiGe异质结构材料应用于纳米集成电路等的应用前景。

SiGe is one of the promising materials to the microelectronics and has important application on silicon integrated circuit. Two kinds of SiGe heterostructures including SiGe/Si and SiGe on insulator were introduced. The preparation technology and research progress of SiGe were reviewed. And the application prospect of SiGe in nano scale integrated circuit was discussed.