红外微辐射元的研制

DEVELOPMENT OF IR MICROEMITTER

利用表面微机械加工技术 ,研制出微桥结构红外微辐射元 .该辐射元是电阻阵列动态红外景象产生器的基本组成单元 .辐射元可以产生等效黑体辐射温度为 30 0～ 5 0 0K的红外辐射 ,能够满足中波、长波红外半实物仿真的需求 .

IR microemitter with microbridge structure has been developed based on surface MEMS( Microelectromechanical Systems) technology. The microemitter is the key cell of resistor array dynamic IR scene generator. The microemitter generated IR radiation which the effective blackbody temperature is between 300K and 500K. It can meet the requirement of simulating MWIR(Medium Wave IR) and LWIR(Long Wave IR) radiation in hardware-in-the-loop simulation system.