白光干涉型光纤法珀腔传感器的制作工艺研究

Research on Manufacture Technology of White-light Interferometric Fiber Fabry-perot Interferometer Sensor

对白光干涉型光纤法布里珀罗干涉仪(WIFFPI)传感器的制作工艺进行了研究,讨论了内、外腔式两种光纤传感法珀腔的制作方法,重点论述了外腔式光纤传感法珀(EFFP)腔的制作工艺,对制作过程中的一些关键问题进行了分析,并提出了解决的方法,为WIFFPI传感器的制作及应用奠定了基础,也为其他类型的光纤法布里珀罗干涉仪传感器的研究及制作提供了参考。

A research on manufacture technology of whitelight interferometric fiber FabryPerot interferometer (WIFFPI) sensor has been made in this paper.The manufacture technology of extrinsic fiber FabryPerot(EFFP) cavity and intrinsic fiber FabryPerot(IFFP) cavity is discussed in this paper.The research is maily on the manulacture technology of EFFP cavity.The key problems during the manufacture of EFFP cavity are analyzed,and the ways to deal with them are presented in this paper too.All works have been done make a foundation for manufacture and application of WIFFPI sensor,and are also gainfal to the research and manufacture of other types of fiber FebryPerot interferometer sensor.