摘要
报道了一种在128°Y切割X传播方向的LiNbO3基片上设计并研制新型的延迟线型声表面波质量传感器及测量系统。由于环境温度对声表面波质量传感器性能影响较大,因此采用新型的Y型双声路结构克服环境温度对传感器性能的影响。阐述了Y型双声路质量传感器器件的结构及设计、测试电路的原理,对实验结果作了分析讨论。测试结果表明:器件相对温度系数仅为11Hz/°C左右,器件的质量沉积效应灵敏度为3.62GHz·cm2/g,并且具有良好的线性度。
In this paper a new type of delay line SAW mass sensor fabricated on 128°Y cut X LiNbO_3 substrate and it's measurement system are reported. As the characteristics of SAW sensor are greatly influenced by temperature, Y-type dual path structure SAW mass sensor is used to reduce its temperature effects. The design and configuration of Y-type dual path SAW mass sensor、 principles of test circuit and experiment results have been explained. The results show that its relative temperature coefficient is only about 11 Hz/°C and its mass loading effect sensitivity is about 3.62 GHz·cm^2/g with a good linearity.
出处
《压电与声光》
CSCD
北大核心
2003年第6期445-448,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(60176027)
浙江省自然科学基金资助项目(600026)
