可记录光盘染料旋涂工艺的流动机制研究

FLOW ANALYSIS IN DYE COATING PROCESS OF RECORDABLE OPTICAL DISC

染料旋涂是可记录光盘复制中的核心工艺。依据实验给出旋涂工艺的简化模型,并运用旋转圆盘理论分析流体流动。考虑基片上的预刻槽对流动的影响,考虑基片表面和流体间的滑移效应,导出运动方程、边界方程和连续方程,最终导出染料旋涂的控制方程。

Dye coating is the key part of the replication process of recordable optical discs. A simplified model of the coating process is given on the basis of experiments and the dye coating process is studied with the rotating disk theory. The motion equation, boundary equations and continuity equation of flow for the dye film are derived, taking into account the topography on the substrate and the interface slip between liquid and substrate. The governing equation is finally obtained.