摘要
以 L a Ni O3( L NO)为独立下电极 ,制备出 Au( Cr) / PZT/ L NO/ Si O2 结构的铁电电容 ,与使用 Pt下电极对比 ,其抗疲劳特性得到了极大的改善 .在 1MHz频率 10 V电压下 ,经过 10 1 1 次脉冲反转 ,其 ( P* - P^ )仅下降了 11%左右 ,这主要是由于使用氧化物电极可以极大地降低 PZT与电极界面处的氧空位的形成和积聚 .通过不同频率和相同频率不同脉冲宽度条件下疲劳特性的测试 ,观察到随着测试频率的升高 ,抗疲劳特性也随之提高 ;在相同频率下 ,随着测试脉宽的加大 ,疲劳现象加剧 ;同时 。
The capacitor with the structure of Au(Cr)/PZT/LNO/SiO 2 is prepared,and its anti-fatigue property compared with conventional Pt bottom electrode is greatly improved.Under 10V and 1MHz,its (P -P ^) has a reduction of 11% after 10 11 cycles because the conducting oxide electrode can reduce the accumulation of the oxygen vacancies at the interface of PZT and electrode.Fatigue tests are carried out under different frequency and pulse-width,and it comes to the conclusion that anti-fatigue property can be improved with the increase of frequency or reduction of pulse-width.The results are explained through the phenomenon of migration of oxygen vacancies and the increase of charged defects.
基金
国家自然科学基金
应用材料AM基金
国防科技预研资助项目
PDC基金资助项目~~
关键词
LNO
氧化物电极
抗疲劳特性
频率
脉宽
LNO
oxide electrodes
anti-fatigue property
frequency
pulse-width
