电化学沉积DLC薄膜的摩擦学性能研究

Tribological Properties of Diamond-Like Carbon Films by Electrochemical Deposition

采用直流电源,以有机溶剂作为碳源,通过电化学沉积方法在单晶硅表面制备了类金刚石碳薄膜.用原子力显微镜、拉曼光谱仪和傅立叶红外光谱仪等表征了薄膜的结构,用DF-PM型动-静摩擦系数精密测定仪考察了薄膜的摩擦学性能.结果表明:电化学沉积含氢类金刚石碳薄膜的硬度较高(约14GPa),薄膜均匀、致密,表面粗糙度小;在室温干摩擦条件下,薄膜同GCr15钢以及α-Al2O3和Si3N4陶瓷对摩时的摩擦系数随载荷增加而略微减小;陶瓷材料/类金刚石碳膜的摩擦系数较低,钢/类金刚石碳膜的摩擦系数较高;类金刚石碳薄膜同Si3N4陶瓷对摩时呈现断裂剥落特征;同GCr15钢对摩时发生转移并形成转移膜,耐磨寿命缩短.

Diamond like carbon (DLC) films were deposited on the Si substrate using the electrochemical method, with methanol as the carbon source and a DC power supply as the power source. The nanohardness of the resulting DLC films was measured with a NANOTEST600. The morphology and the microstructure of the DLC films were analyzed by means of atomic force microscopy, Raman spectrometry and Fourier transformation infrared spectrometry. The friction and wear behaviors of the DLC films in sliding against SAE52100 steel, α-Al2O3 and Si3N4 ceramic balls at different loads were examined on a DF-PM dynamic friction coefficient procession measurement apparatus in a ball-on-disk configuration at ambient condition. Results showed that the films prepared were hydrogenated diamond-like carbon films and had a nanohardness as high as 14 GPa. They consisted of nanoparticles with a diameter of 100-200 nm and were very much smooth and compact. The DLC films showed excellent friction-reducing and antiwear ability in sliding against Si3N4 and α-Al2O3. They had poor wear resistance in dry sliding against SAE52100 steel, though a lower friction coefficient was still recorded in this case. The different friction and wear behaviors of the DLC films in sliding against different counterparts were attributed to their different wear mechanisms therewith. Namely, the DLC films were characterized by slight scuffing in sliding against the two ceramic counterparts, while they were dominated by adhesion and abrasive wear in sliding against the steel counterpart.