摘要
本文分析了影响Si_3N_4微粒共沉积的各种因素,并基于两步吸附理论导出了微粒化学共沉积的数学模型,从而对实际试验结果作出了满意的理论解释。
This paper analyses all the factors that influence the codeposition of Si_3N_4 particles, and derives the mathematical model of particles' codeposition according to the two—step adsorption theory. As a result, satisfactory theoretical explanations to practical test results are obtained.
关键词
化学复合镀
吸附
共沉积机理
chemical composite plating
adsorption
codeposition mechanism
