二氧化钛薄膜的液相沉积法制备研究

The Study on the Preparation of Titanium Dioxide Thin Film by Liquid Phase Deposition Method

常温下,采用锐钛矿型二氧化钛纳米晶为诱导剂,采用液相沉积法制备了二氧化钛薄膜.采用XRD、SEM、AFM对其晶型、平均晶粒尺寸和形貌进行表征.结果表明,室温所制的二氧化钛薄膜为锐钛矿型,平均粒径为5.8nm,二次粒子平均粒径为10nm.薄膜上观察不到明显的孔洞和裂纹,表面均匀平整.以苯酚的光催化氧化作为目标反应,评价了二氧化钛薄膜的光催化活性.

Using supersaturated anatase nanocrystallin TiO_2 as an inducex, the TiO_2 thin film was prepared by liquid phase deposition method at room temperature. The properties of titanium dioxide thin film were charactered by XRD, SEM and AFM. The results showed that titanium dioxide thin film was anatase whose average grain size is 5.8 nm, the aggregated particles with 10 nm. There were no holes and flaws on the thin film. The photocatalytic activity of titanium dioxide thin film was evaluated with the degradation of phenol.