制备类金刚石薄膜过程中的等离子体发射光谱

OPTICAL EMISSION SPECTROSCOPY IN DIAMOND-LIKE CARBON FILM DEPOSITION

测定了不同反应条件下,不同空间位置的等离子体发射光谱,并与相应条件下生成的类金刚石薄膜的红外吸收谱进行对照,分析了它们之间的关系。

We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode. The infrared absorption of films were also measured and the results of infraredabsorption were compared with that of OES measurement.