摘要
对用于ICF驱动器分频光栅的刻槽深度进行了优化,使其具有更优的分频效果。在此基础上,对制作工艺带来的占空比误差和塌边结构进行了分析,给出了分频光栅具有良好分频效果时工艺上所能允许的误差范围。
In this paper, the depth of color separation grating applied in ICF system is optimized firstly for good separating effect. After this, duty cycle error and the trapezoid structure are analyzed. A probable scope of technologic error that make the color separation grating have good effect is given in the end.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2003年第5期455-458,共4页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
关键词
ICF系统
分频光栅
占空比
塌边结构
允许误差
ICF system
Color separation grating
Duty cycle
Trapezoid structure
tolerance
