用于分子束外延的慢正电子束在线分析系统

AN IN-LINE ANALYSIS SYSTEM OF SLOW POSITRON BEAM FOR MOLECULAR BEAM EPITAXY

本文系统地介绍用于分子束外延的慢正电子束在线分析系统的设计与研制,提出用慢正电子束技术在线研究半导体薄膜的分析方法,在正电子慢化器中采用多钨环加百叶窗组合结构,得到较高的快-慢正电子转换效率。

The design and arrangement of an in-line analysis system of slow positron beam for molecular beam epitaxy is described and the analysis method using positron beam technique to study semiconductor films is introduced. In the slow positron moderator, a combination of tungsten-rings and 'Venetian blind' structure are used to obtain a higher efficiency of conversion from fast to slow positrons.