纳米机械加工与材料表面性质研究

Research on nano-cutting and mechanical properties of materials

纳米科技的发展和应用涉及纳米器件的加工、制作以及加工表面特征、性质和功能等研究。获得能够控制在微小区域的纳米加工技术手段、能对不同材料进行纳米加工以及能对过程和加工表面进行检测分析等是十分重要的。本文结合扫描探针显微镜和金刚石超精密加工技术 ,对金刚石纳米切削展开实验研究。实验表明 ,结合扫描探针显微技术直接使用金刚石刃具进行材料的纳米量级机械加工 ,能够适应对不同材料微去除加工的要求 ,可同时对加工表面、机械加工机理以及表面的加工力学性能等进行综合研究 。

Manipulating, controlling or machining at nano scale are very important for nanotechnology.In many cases, it is not only needed to get an excellent fine surface, but the properties of such surface also need to be investigated for making nano\|device or other purposes. The surface mechanical properties are often encountered in engineering and material research. In this paper, based on the scanning probe microscopy, a method with diamond tool for cutting was used in nano scale experimental investigation of material removal. It is found that nano cutting can be carried on well in such system,and mechanical properties of surface, machinabilities of a material can be researched at nano scale.