摘要
用27keV Ar^+离子对Ni-50wt％ Ti,Fe-30wt％ W和Ag-50wt％ Cu合金进行溅射,发现Ti,Fe和Ag原子在小角区择优发射。与此同时,扫描电子显微镜(SEM)结合电子探针微分析(EPMA)显示所有样品的靶点表面形貌均由凸起和凹陷两种微区组成的特征,并且各种微区具有不同的元素富集。用据此提出的模型对各合金组分的溅射原子角度择优发射特点进行分析,得到了与实验符合的结果。
The angular distributions of atoms sputtered from Ni-50Wt%Ti, Fe-30Wt%W and Ag-50Wt%Cu alloys by 27keV Ar+ ions bombardment nave been masured. It has been found that Ti, Fe and Ag atoms were sputtered preferentially at small angles. The sputtered surfaces have been analyzed by SEM combined with EPMA. It has been showed that all the surface topographies of three samples consisted of two different parts i.e. convex and concave regions, corr responding dif ferent components being richer at different region. A model has been suggested to explan this phenomenon.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第10期1722-1727,共6页
Acta Physica Sinica
基金
国家自然科学基金
