摘要
制作了电热激励硅 /二氧化硅双层微悬臂梁谐振器。对影响谐振器输出电压的因素研究结果表明 :减小梁宽度、硅层厚度、环境气压和温度 ,可增大微悬臂梁谐振器输出电压 ;输出电压随激励功率增加而增大 ;谐振器输出电压与谐振器根部压敏电桥电源电压成正比。
Si/SiO 2 double-l a yer micromechanical cantilever resonato rs with electric-thermal excitation are fabricated by microelectronic and microm echincal technologies. The study on the factors influencing the output voltage o f the resonators shows that: (i)the outp ut voltage increases with decreasing the broad of beam, the thickness of the sil icon layer, ambient pressure and temper ature; (ii)the output voltage increases with excitation power; (iii)the output v oltage increases directly proportional t o DC voltage applied on the Wheatstone br i dge at the clamped end of beam. At last, the feasible method of increasing the v oltage of resonators is discussed.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2003年第4期504-507,519,共5页
Research & Progress of SSE
基金
国家自然科学基金 (60 0 3 60 16
50 0 770 16)
教育部开放基金 (CETD0 0 -10 )资助
