利用双层辉光放电形成Mo-N硬质镀层

Preparation of molybdenum nitride hard coating by double glow discharge technique

用双层辉光放电在钛合金Ti6Al4V表面形成了Mo N硬质镀层。用X射线衍射仪和纳米压入仪分别对镀层的相结构、硬度和弹性模量进行了研究,并用涂层压入仪对镀层与基体间的结合强度进行了测定。结果表明:Ti6Al4V表面形成了均匀的Mo N硬质镀层,镀层厚约10μm,由面心立方结构Mo2N化合物构成;Mo2N硬质镀层的硬度和弹性模量分别为13.80GPa和261.65GPa;镀层与基体间具有较好的结合强度。

The MoN hard coating on Ti6Al4V substrate was formed by the double glow discharge technique. The phase, hardness and elastic modulus of the coating were analyzed with Xray diffractometer and nano indentator respectively.The adhesive strength of the MoN hard coating/Ti6Al4V substrate system was investigated with coating indentator. The results show that, the thickness of MoN hard coating is about 10 μm; the coating consists of fcc structure Mo2N; the hardness and elastic modulus of the coating are 13.80 GPa and 261.65 GPa respectively. The MoN hard coating/Ti6Al4V substrate system has good adhesive strength.