镀膜硅微机械谐振器光热激励的实验研究

A Laboratory Study of Photothermal Excited Silicon Microresonators with Coated Film

对镀膜双层硅微机械谐振器的光热激励进行了实验研究 ,在大气环境下对硅微谐振器进行了光激电拾实验测试和光激光拾实验测试。成功观测到了硅微谐振器的一阶、二阶和三阶谐振状态。在光激光拾实验测试中提出了一种新颖的“单光源实验测试方法” ,即 :使用同一光源同时实现硅微谐振器的光热激振和微弱谐振信号的提取 ,这与传统的“双光源实验方法”相比 ,简化了实验系统 ,有利于实用化开发。

s: An experimental study on the photothermal excitation of bi-layered silicon microresonator is presented. Two methods are used to test the microresonators in the air environment, including the photothermal excitation and electrical sensing method. Corresponding vibration waves of the first three modes are observed in the experiments successfully. By using single optical source, a new method is presented to realize the photothermal excitation and optical sensing at the same time which is more suitable for further application than the traditional two optical sources system.